软X射线多层膜界面粗糙度的计算

提出一个在小角范围内计算多层膜界面粗糙度的理论计算公式 ,通过不同样品的小角度衍射曲线进行计算 ,结果表明由该公式根据不同周期、不同级次衍射峰计算的粗糙度相差比较小 ,而在相同条件下用已报道公式给出结果相差比较大。该理论公式获得的计算结果与实际观测结果比较一致。

Calculation of Interfacial Roughness of Multilayers

This paper gives a simple formula for calculating the roughnessof multilayer by using the small angle X-ray diffraction curves of the samples. The differences of the calculated values of roughness from the formula for the different pairs of peaks of a diffraction curve of the sample or different samples are very little, but these differences from B. Abples′ formula are considerably large. The calculated results are also in good conformity with the measured values reported.