| 霍尔式位移传感器的研究 |
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| 引用本文： | 张劲松 方军庆. 霍尔式位移传感器的研究[J]. 仪表技术与传感器, 1997, 0(3): 11-13 |
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| 作者姓名： | 张劲松 方军庆 |
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| 作者单位： | 哈尔滨工业大学，中航油东北公司 |
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| 摘 要： | 本文研究了以半导体材料砷化镓霍尔器件与高性能稀土永磁材料构成的小位移传感器及其检测电路，推导了位移量与霍尔电势的关系，建立了传感器的数学模型，并对非线性和温度误差进行了理论分析，在传感器的设计上实现了变换器与变换电路的一体化封装。经实际应用证明，传感器可分辨的最小位移变化量为０．１μｍ，本测量系统切实可行，有一定的推广应用价值。
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| 关 键 词： | 霍尔效应 位移 测量 传感器 |
Research on Hall Displacement Sensor |
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| Zhang Jinsong,and Feng Guohua Harbin Institute of Technology,Harbin .. Research on Hall Displacement Sensor[J]. Instrument Technique and Sensor, 1997, 0(3): 11-13 |
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| Authors: | Zhang Jinsong and Feng Guohua Harbin Institute of Technology Harbin . |
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| Affiliation: | Zhang Jinsong,and Feng Guohua Harbin Institute of Technology,Harbin 150001. |
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| Abstract: | The principle of a micro displacement sensor with a resolution of 0.1 composed of GaAs Hall sensing element and high performance rare earth materials, and its measurement circuit are presented in this paper. Meanwhile, the relationship between the displacement and Hall voltage, the mathematical model of the sensor, and theoretical analysis of the non linearity and temperature errors are also described. |
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| Keywords: | Hall Effect Displacement Measurement Sensor. |
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