Recent Developments in Equipment and Application of Ion Beam Assisted Thin Film Deposition

Ion beam assisted deposition (IBAD) of thin films is still a new technology with respect to the number of applications. A broader industrial application depends on the availability and versatility of facilities which are able to process various kinds of workpieces under appropriate conditions. Recently, IBAD facilities of the second generation were described in literature and are partially commercially available. In the present report such IBAD machines with their special features such as number and kind of ion sources and evaporators are described. Particularly, the set-up of the ALLIGATOR, a versatile IBAD device for coating complex workpieces under ion bombardment with a broad range of ion energies, is described. As an application example, recent results on the treatment of medical implants are discussed. In -vivo tests of coated cardiovascular stents showed that the deposited noble metal films were effective in influencing the corrosivity and thromboresistance of the implant