An Integral approach to measurement of surface roughness parameters from light scattering in dielectric waveguides

An integral approach to measurement of the mean square deviation of a rough surface from light scattering in planar dielectric waveguides is proposed. A relationship between the attenuation coefficient of waveguide modes, waveguide parameters, and surface roughness is established. The limiting sensitivity of the method is estimated, and the simplicity of the method implementation and the high sensitivity of measurements are experimentally demonstrated.