| 脉冲多弧离子镀研究 |
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| 引用本文： | 杭凌侠 严一心. 脉冲多弧离子镀研究[J]. 西安工业学院学报, 1996, 16(2): 110-113 |
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| 作者姓名： | 杭凌侠 严一心 |
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| 摘 要： | 介绍一种新型镀膜方法的工作原理及相关参数，介绍了采用这种新型镀膜方法镀制的类金刚石膜层的性能．
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| 关 键 词： | 离子镀，离子源，类金刚膜 |
Studies on the pulsed poly-arc-ion source and the deposition technique |
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| Hang Lingxia, Yan Yixin, Zhu Chang. Studies on the pulsed poly-arc-ion source and the deposition technique[J]. Journal of Xi'an Institute of Technology, 1996, 16(2): 110-113 |
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| Authors: | Hang Lingxia Yan Yixin Zhu Chang |
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| Affiliation: | Hang Lingxia; Yan Yixin; Zhu Chang |
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| Abstract: | in this paper,the principle and the interrelated parameters of a new deposition method are introduced,and the characters of the diamond like carbon films deposited by the pulsed poly-arc-ion source are discussed. |
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| Keywords: | ion deposition ion source diamond like carbon films |
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