Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process |
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Affiliation: | 1. Department of Mechanical Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka, 565-0871, Japan;2. Production Engineering Research Laboratory, Production Engineering, Headquarters, Canon Inc., 23-10 Kiyohara-kogyodanchi, Utsunomiya, Tochigi, 321-3298, Japan;1. Chubu University, 1200 Matsumotocho, Kasugai, Aichi, 487-8501, Japan;2. University College London, Gower St., London, WC1E 6BT, United Kingdom;3. National Facility for Ultra Precision Surfaces, Glyndwr University, St Asaph, LL17 0JD, United Kingdom;4. Zeeko Ltd, 4 Vulcan Court, Coalville, Leicestershire, LE67 3FW, United Kingdom;1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang, 110819, PR China;2. School of Aerospace, The University of Nottingham Ningbo China, Ningbo, 315100, PR China |
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Abstract: | With the advance of contemporary technology, high precision surface finishing techniques for optical glasses are of great concern and developing to meet the requirements of the effective industrialized processes. Not only the used tools but also process parameters have great influence on the surface roughness improvements. In this paper, surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process has been presented. For the same purpose, a tool for executing ultra precision polishing was designed and manufactured. Taguchi's experimental approach, an L18 orthogonal array was employed to obtain the optimal process parameters. ANOVA analysis has also been carried out to determine the significant factors. It was observed that about a 98.33% improvement on surface roughness from (Ra) 0.360 μm to (Ra) 0.006 μm has been achieved. The experimental results show that a surface finished achieved can satisfy the requirements for optical-quality surface (Ra < 12 nm). In addition, the influence of significant factors on surface roughness improvement has been discussed in this study. |
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Keywords: | Abrasive fluid jet polishing Multi-jet polishing ANOVA Surface roughness Taguchi method Zerodur |
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