| 基于层次级联模型的声表面波COM参数提取方法 |
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| 引用本文： | 李桦林,谭发曾,伍平. 基于层次级联模型的声表面波COM参数提取方法[J]. 压电与声光, 2022, 44(2): 187-190 |
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| 作者姓名： | 李桦林 谭发曾 伍平 |
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| 作者单位： | 中国电子科技集团公司 第二十六研究所,重庆 400060 |
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| 摘 要： | 该文研究了基于层次级联模型的耦合模(COM)参数提取方法。通过仿真42°Y-X LiTaO3衬底的有限长声表面波(SAW)单端谐振器，提取COM参数及建立COM参数数据库，研制了一款1 200 MHz的三换能器混合结构的SAW滤波器。结果表明，实际制作器件响应和仿真幅频响应符合性好，验证了该文提取COM参数方法的可行性，可用于指导SAW滤波器设计。
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| 关 键 词： | 声表面波滤波器 层次级联 耦合模(COM)参数 |
A Method for Extracting COM Parameters of Surface Acoustic Wave Based onHierarchical Cascading Technique |
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| LI Hualin,TAN Fazeng,WU Ping. A Method for Extracting COM Parameters of Surface Acoustic Wave Based onHierarchical Cascading Technique[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 187-190 |
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| Authors: | LI Hualin TAN Fazeng WU Ping |
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| Affiliation: | The 2 6.th Institute of China Electronic Technology Group Corporation,Chongqing 400060 ,China |
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| Abstract: | This paper studied the COM parameters extraction method based on the hierarchical cascading technique. By simulating on a finite-length SAW single port resonator on 42° rotated Y-X LiTaO3 substrate, the COM parameters were extracted and the COM parameters datasets was established. A 1 200 MHz SAW filter with 3-IDT CRF hybrid structure has been developed. The results show that the amplitude-frequency response of the actual device is in good agreement with that of the simulated one,which verifies the feasibility of the method of extracting COM parameters in this article,and can be used to guide the design of SAW filters. |
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