| 纳米定位测量机操作-测量结果 |
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| 引用本文： | JÄGER Gerd GRÜNWALD Rainer,MANSKE Eberhard HAUSOTTE Tino FÜβL Roland.纳米定位测量机操作-测量结果[J].纳米技术与精密工程,2004,2(2):81-84. |
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| 作者姓名： | JÄGER Gerd GRÜNWALD Rainer MANSKE Eberhard HAUSOTTE Tino FÜβL Roland |
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| 作者单位： | 德国伊尔梅瑙工业大学,德国 |
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| 摘 要： | 伊尔梅瑙工业大学过程测量和传感技术研究所研制了三维纳米定位和测量机(NPMM).阿贝无偏设计使得该机器异常精确.在整个25
mm×25 mm×5 mm的定位和测量域内,干涉测长系统分辨力可达0.1 nm,不确定度达5～10
nm.提供了纳米定位测量机的基本信息,介绍其操作模式,并给出了测量结果.
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| 关 键 词： | 纳米定位 纳米测量 激光干涉仪 控制系统 长距扫描探针技术 |
A Nanopositioning and Nanomeasuring Machine:Operation-Measured Results |
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| JGER Gerd,GRNWALD Rainer,MANSKE Eberhard,HAUSOTTE Tino,FβL Roland.A Nanopositioning and Nanomeasuring Machine:Operation-Measured Results[J].Nanotechnology and Precision Engineering,2004,2(2):81-84. |
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| Authors: | JGER Gerd GRNWALD Rainer MANSKE Eberhard HAUSOTTE Tino FβL Roland |
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| Affiliation: | J(A)GER Gerd,GR(U)NWALD Rainer,MANSKE Eberhard,HAUSOTTE Tino,F(U)βL Roland |
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| Abstract: | At the Institute of Process Measurement and Sensor Technology of Technical University of Ilmenau,a three-di
mensional nanopositioning and nanomeasuring machine (NPM-Machine) has been developed.The Abbe offset-free design
provides extra-ordinary accuracy.In the entire positioning and measuring range of 25 mm × 25 mm × 5 mm the interferomet
ric length measurement system reaches a resolution of 0.1 nm and an uncertainty of 5 ～ 10 nm.The article gives basic in
formation on this nanopositioning and measuring machine,explains its mode of operation and represents measurement re
sults. |
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| Keywords: | nanopositioning nanomeasuring laserinterferometer controlsystem long-range scanning probe technique |
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