A new technology for fast switching circuits on glass

A low-temperature self-aligned photolithographic process is described to fabricate fast switching digital poly-CdSe thin-film transistors (TFT's) on glass, The use of sintered CdSe-In2Se3mixtures as an evaporation source for the semiconductor resulted in TFT's with attractive static and dynamic characteristics. The measured inverter delay for a 20-µm technology was 75 ns.