Thermodynamic predictions for material processing in a plasma reactor using solid oxide feed materials

Thermodynamic calculations, based on a free energy minimization (FEM) program, are presented for a number of material synthesis systems pertinent to plasma processing. Thermo-dynamic analysis gives general guidelines for the expected reactions and equilibrium compo-sition of species at different temperatures and pressures. Thermodynamics also allows the preliminary screening of possible synthesis reactions. These predictions should be used along with kinetic considerations for any proposed reaction system. Experimental results are presented to elucidate these thermodynamic predictions.