| 关于微机电系统研究 |
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| 引用本文： | 温诗铸. 关于微机电系统研究[J]. 中国机械工程, 2003, 14(2): 159-163 |
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| 作者姓名： | 温诗铸 |
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| 作者单位： | 清华大学,北京市,100084 |
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| 摘 要： | 微机电系统是面向21世纪的新科技。由于目前尚处于开创时期，人们对它还缺乏统一的全面认识。试图对微机电系统产生的前景，组成特征，发展现状及应用前景进行全面分析。在此基础上，提出和论述了未来发展中的几个关键问题。
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| 关 键 词： | MEMS 工作模式 发展前景 微机电系统 |
| 文章编号： | 1004-132X(2003)02-0159-05 |
Researches on the Micro-electromechanical System |
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| Wen Shizhu. Researches on the Micro-electromechanical System[J]. China Mechanical Engineering, 2003, 14(2): 159-163 |
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| Authors: | Wen Shizhu |
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| Abstract: | Micro-electromechanical System is a high technology newly emerged in the 21th century. Now a universal and profound knowledge about MEMS is still deficient due to its infant period. This paper investigates the background, characteristics, state-of-the-art and application prospect of MEMS. Further more, several key problems involved in the future development are put forward. |
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| Keywords: | micro-electromechanical system background characteristic key problem |
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