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Microstructure and variable emittance property of annealed La-Sr-Mn-O films
Authors:JIANG Shaoqun  MA XinXin  TANG Guangze  WANG Zehua  WANG Gang  ZHOU Zehua
Affiliation:JIANG Shaoqun1,2,MA Xinxin 2,TANG Guangze2,WANG Zehua 1,WANG Gang2,ZHOU Zehua 1 (1.College of Mechanics and Materials,Hohai University,Nanjing 210098,China,2.School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China)
Abstract:The La-Sr-Mn-O films were deposited on Si(100) substrates by DC magnetron sputtering and followed by air annealing at 973 K for 1 h.The microstructure and temperature dependence of total hemispherical emittance ( H) of the annealed La-Sr-Mn-O films prepared at various processing parameters were investigated.The results indicated the films deposited at lower sputtering pressure and lower O2/(O2+Ar) volume proportion (RO) were present in rhombohedral perovskite structure and the length of Mn-O bond was shorte...
Keywords:manganese oxide  thin film  thermal control  variable emittance  metal-insulator transition  rare earths  
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