| 新型激光干涉仪 |
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| 引用本文： | 方毓文,王民明.新型激光干涉仪[J].现代计量测试,2000,8(6):9-12. |
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| 作者姓名： | 方毓文 王民明 |
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| 作者单位： | 中国计量科学研究院,北京 |
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| 摘 要： | ＬＭ－６Ｄ激光干涉测量系统是于１９９８年推出的新型激光干涉仪，一次安装调整能同时测出位置（长度），Ｘ及Ｙ方向直线度、信仰角、偏摆角和滚动等六个参数值。不仅保持了激光干涉测量精度高的特点，同时实现了多参数同步测量，减少测量时间８０％，大大提高了测量效率。
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| 关 键 词： | 多参数测量 LM－6D激光干涉仪 测量精度 |
A Novel Laser Interferometer |
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| FANG Yu\|wen,WANG Min\|ming.A Novel Laser Interferometer[J].Modern Measurement and Test,2000,8(6):9-12. |
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| Authors: | FANG Yu\|wen WANG Min\|ming |
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| Abstract: | LM\|6D Laser Interferometric System is a novel laser interferometer developed in 1986.It can measure the six parameters,such as position (length).X\| and Y\|axis straightness,angle of pitch,deflection angle,roll,etc. at the same time.It has the features of high pecision,multi\|parameter measurement and high speed and high efficiency. |
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| Keywords: | laser interferometer multi-parameter measarement high precision high efficiency |
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