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高亮度LED中ODR反光镜反射率温度特性研究
引用本文:宋欣原,邹德恕,张剑铭,刘思南,沈光地.高亮度LED中ODR反光镜反射率温度特性研究[J].固体电子学研究与进展,2008,28(3).
作者姓名:宋欣原  邹德恕  张剑铭  刘思南  沈光地
作者单位:北京工业大学,北京市光电子技术实验室,北京,100022
基金项目:国家重点基础研究发展计划(973计划),北京市科委科研项目,北京工业大学校科研和教改项目,国家自然科学基金,北京市自然科学基金
摘    要:对Al/SiO2、Al/ITO、Au/SiO2、Au/ITO构成的ODR(Omni-directional reflector)结构,对应400~800 nm的不同波长,在不同温度下,对于反光镜的反射率的影响,进行了研究。提出了在460 nm的蓝光波段,Al/SiO2合金温度在500~700 K时,反射率会达到最小值,温度在700 K以上时,又到常温值,且略微增加;Al/ITO反射率是随着温度变化单调下降的,因此要在Al反光镜的表面采用Ti/Al/Ti/Au的结构,改善反光镜的特性;620 nm的红光波段,Au/SiO2和Au/ITO的合金温度在700 K时,具有最理想的反射率,且Au/SiO2结构的反射效果要优于Au/ITO结构。用实验的方式进行了验证,分析了可能造成反射率变化的原因。

关 键 词:退火  反射率  全方位反光镜结构

Temperature Characteristic of Reflectivity of Omni-directional Reflector in the High Brightness Light-emitting Diodes
SONG Xinyuan,ZOU Deshu,ZHANG Jianming,LIU Sinan,SHEN Guangdi.Temperature Characteristic of Reflectivity of Omni-directional Reflector in the High Brightness Light-emitting Diodes[J].Research & Progress of Solid State Electronics,2008,28(3).
Authors:SONG Xinyuan  ZOU Deshu  ZHANG Jianming  LIU Sinan  SHEN Guangdi
Affiliation:SONG Xinyuan ZOU Deshu ZHANG Jianming LIU Sinan SHEN Guangdi(Beijing University of Technology,Beijing Opto-electronic Technology Laboratory,Beijing,100022,CHN)
Abstract:This paper researches the influence of different anneal temperature to the reflectivity of the Al/SiO_2,Al/ITO,Au/SiO_2 Au/ITO ODR corresponding to the wavelength of 400nm~800 nm.It is proposed that,in the wavelength of 460 nm,the reflectivity is down to minimum when the anneal temperature of Al/SiO_2 reflector is 500~700 K,and when temperature above 700°C,it is back to normal and increase a little;the one of Al/ITO decreases monotonic with the increasing temperature,and Ti/A/Ti/Au structure is applied to improve the characteristic of the reflector.Moreover,it is also noted that,in the wavelength of 620nm,reflectivity of Au/SiO_2 and Au/ITO both achieve the maximum with the anneal temperature of 700K,and the performance of Au/SiO_2 ODR is superior to that of Au/ITO.We validates the conclusion with the experiment and analysis the cause of the variation of the reflectivity.
Keywords:anneal  reflectivity  omni-directional reflector structure  
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