| 激发物激光烧蚀法制备铁电和压电薄膜 |
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| 引用本文： | 刘一声.激发物激光烧蚀法制备铁电和压电薄膜[J].压电与声光,1994(4). |
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| 作者姓名： | 刘一声 |
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| 作者单位： | 四川压电与声光技术研究所 |
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| 摘 要： | 本文叙述用激发物激光烧蚀法沉积几种铁电和压电薄膜的制备法和性能，并介绍了这些薄膜在微电子学器件和微波声学器件方面的应用。
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| 关 键 词： | 激发物激光，激光烧蚀，铁电薄膜，压电簿膜 |
Ferroelectric and Piezoelectric Thin Films Prepared by Excimer Laser Ablation Method |
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| Liu Yisheng.Ferroelectric and Piezoelectric Thin Films Prepared by Excimer Laser Ablation Method[J].Piezoelectrics & Acoustooptics,1994(4). |
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| Authors: | Liu Yisheng |
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| Abstract: | This paper reviewed the fabrication and properties of several ferroelectric and piezoelectric thin films prepared by excimer laser ablation method. Furthermore,the applications of these thin films to the microelectronic devices and microwave acoustic devices are also presented. |
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| Keywords: | excimer laser laser ablation ferroelectric film piezoelectric film |
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