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ZnO-capped nanorod gas sensors
Affiliation:1. Department of Materials Science and Engineering, Shiraz University, Shiraz, Iran;2. Department of Materials Science and Engineering, Inha University, 253 Yonghyun-dong, Nam-gu, Incheon 402-751, Republic of Korea;3. Department of Electronic Engineering, Inha University, 253 Yonghyun-dong, Nam-gu, Incheon 402–751, Republic of Korea;1. School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon Gyeonggi, Republic of Korea;2. Smart Sensor Research Center, Korea Electrical Technology Institute (KETI), Seongnam Gyeonggi, Republic of Korea;3. SKKU Advanced Institute of Nanotechnology (SAINT), Suwon, Gyeonggi, Republic of Korea;1. Department of Materials Science and Engineering, Yunnan University, 650091 Kunming, People''s Republic of China;2. Yunnan Province Key Lab of Micro-Nano Materials and Technology, Yunnan University, 650091 Kunming, People''s Republic of China;1. Department of Chemical Engineering, Feng Chia University, 100, Wenhwa Road, Seatwen, Taichung 40724, Taiwan, ROC;2. Department of Materials Science and Engineering, National Taiwan University of Science and Technology, 43, Section 4, Keelung Road, Taipei 106, Taiwan, ROC
Abstract:This paper reports on the synthesis of pristine α-Fe2O3 nanorods and Fe2O3–ZnO core–shell nanorods using a combination of thermal oxidation and atomic layer deposition (ALD) techniques; the completed nanorods were then used for ethanol sensing studies. The crystal structure and morphology of the synthesized nanostructures were examined by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The sensing properties of the pristine and core–shell nanorods for gas-phase ethanol were examined using different concentrations of ethanol (5–200 ppm) at different temperatures (150–250 °C). The XRD and SEM revealed the excellent crystallinity of the Fe2O3–ZnO core–shell nanorods, as well as their uniformity in terms of shape and size. The Fe2O3–ZnO core–shell nanorod sensor showed a stronger response to ethanol than the pristine Fe2O3 nanorod sensor. The response (i.e., the relative change in electrical resistance Ra/Rg) of the core–shell nanorod sensor was 22.75 for 100 ppm ethanol at 200 °C whereas that of the pristine nanorod sensor was only 3.85 under the same conditions. Furthermore, under these conditions, the response time of the Fe2O3–ZnO core–shell nanorods was 15.96 s, which was shorter than that of the pristine nanorod sensor (22.73 s). The core–shell nanorod sensor showed excellent selectivity to ethanol over other VOC gases. The improved sensing response characteristics of the Fe2O3–ZnO core–shell nanorod sensor were attributed to modulation of the conduction channel width and the potential barrier height at the Fe2O3–ZnO interface accompanying the adsorption and desorption of ethanol gas as well as to preferential adsorption and diffusion of oxygen and ethanol molecules at the Fe2O3–ZnO interface.
Keywords:D  ZnO  ALD  Gas sensor  Core–shell  Ethanol
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