首页 | 本学科首页   官方微博 | 高级检索  
     


Effect of the Ti-target arc current on the properties of Ti-doped ZnO thin films prepared by dual-target cathodic arc plasma deposition
Affiliation:1. Department of Electrical Engineering, National Kaohsiung University of Applied Sciences, Taiwan;2. Medical Devices and Opto-electronics Equipment Department, Metal Industries Research & Development Center, Taiwan;3. Department of Materials Engineering National Ping-Tung University of Science and Technology, Taiwan;1. State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;2. School of Materials Science and Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;1. Centre of Polymer and Carbon Materials, Polish Academy of Sciences, M. Curie-Sklodowskiej 34, 41-819 Zabrze, Poland;2. Institute of Physics, University of Silesia, 75 Pulku Piechoty 1A, 41-500 Chorzow, Poland;3. Silesian Center for Education and Interdisciplinary Research, 75 Pulku Piechoty 1A, 41-500 Chorzow, Poland;1. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China;2. State Key Laboratory of Structure Analysis for Industrial Equipment, Dalian University of Technology, Dalian 116024, China;1. Pacific Northwest National Laboratory, Richland, WA, 99354, United States;2. Korean Atomic Energy Research Institute, Yuseong-gu, Daejeon, Republic of Korea;3. Argonne National Laboratory, Lemont, IL, 60439, United States;1. LIEC-Department of Chemistry, UFSCar - Federal University of São Carlos. São Carlos, SP, Brazil;2. UFABC - Federal University of ABC. Santo André, SP, Brazil;3. Institute of Chemistry UNESP, São Paulo State University. Araraquara, SP, Brazil
Abstract:
Keywords:Transparent conductive oxide (TCO)  Ti:ZnO  Transmittance  Resistivity
本文献已被 ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号