A new sol-gel route to prepare dense Al2O3 thin films |
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| Affiliation: | 1. Department of Advanced Materials Engineering for Information & Electronics, Kyung Hee University, Yongin, Gyeonggi-do 446-701, Republic of Korea;2. Next Generation Display Research Department, ETRI, Daejeon 305-350, Republic of Korea;1. College of Chemistry and Pharmaceutical Engineering, Nanyang Normal University, Nanyang, 473000 China;2. School of Materials and Energy, Guangdong University of Technology, Guangzhou, 510006 China;1. Key Laboratory of Aerospace Advanced Materials and Performance, Ministry of Education, School of Materials Science and Engineering, Beihang University, Beijing 100191, China;2. School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China;3. Beijing Key Laboratory for Advanced Functional Materials and Thin Film Technology, School of Materials Science and Engineering, Beihang University, Beijing 100191, China;1. Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Key Laboratory for the Green Preparation and Application of Functional Materials, Ministry of Education, Hubei Key Laboratory of Polymer Materials, School of Materials Science and Engineering, Hubei University, Wuhan 430062, China;2. National Engineering Laboratory of TFT-LCD Materials and Technologies, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China |
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| Abstract: | Anew sol-gel route has been applied to synthetize dense Al2O3thin films from aluminum isopropoxide (Al(OPri)3)as raw precursor material. The results show that, in the solution, acetylacetone (AcAc) and aluminum form a complex compound which effectively suppresses the growth of colloidal particles and makes the sol very stable. Al2O3thin films fabricated by spin-coating method and calcined at 500 °C for 3 h possess an amorphous structure and exhibit a highly homogeneous surface texture without evidence of holes or cracks throughout the film. Moreover, the prepared films display a low leakage current and a high transmittance. This new sol-gel route appears to be a highly promising method to synthetize dense Al2O3 thin films from Al(OPri)3, and could provide a wide range of optical and electric applications. |
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| Keywords: | Sol-gel Spin-coating Chelating agent |
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