Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films |
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| Affiliation: | 1. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China;2. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China;3. College of Electronic Science and Technology, Dalian University of Technology, Dalian 116024, China;4. University of Surrey, Surrey GU2 7XH, UK;1. Department of Radiology, Ren Ji Hospital, School of Medicine, Shanghai Jiao Tong University, No. 160, Pujian Rd, Shanghai 200127, China;2. Department of Pathology, Ren Ji Hospital, School of Medicine, Shanghai Jiao Tong University, Shanghai, China;1. Department of Diagnostic and Interventional Radiology, Ren Ji Hospital, School of Medicine, Shanghai Jiao Tong University, 160, Pujian Rd, Shanghai 200127, China;2. Department of Obstetrics and Gynecology, Ren Ji Hospital, School of Medicine, Shanghai Jiao Tong University, Shanghai, China;1. Institute of Chemistry, Faculty of Natural Sciences and Mathematics, Sts. Cyril and Methodius University, POB 162, 1000 Skopje, Macedonia;2. Research Center for Environment and Materials, Macedonian Academy of Sciences and Arts, Krste Misirkov 2, 1000 Skopje, Macedonia;1. Key Laboratory for Anisotropy and Texture of Materials, Ministry of Education, Northeastern University, 3-11 Wenhua Road, Shenyang 110819, PR China;2. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, PR China;1. Condensed Matter Science and Technology Institute, Harbin Institute of Technology, Harbin 150080, China;2. College of Applied Science, Harbin University of Science and Technology, Harbin 150080, China;3. Materials Research Institute, The Pennsylvania State University, University Park, PA 16802, USA;1. Guangxi Scientific Experiment Center of Mining, Metallurgy and Environment, State Key Laboratory Breeding Base of Non-ferrous Metal and Characteristic Materials Processing, College of Materials Science and Engineering, Guilin University of Technology, Guilin 541004, China;2. Department of Physical Chemistry, University of Science and Technology Beijing, Beijing 100083, China;3. Laboratory of Chemical Analysis Elaboration and Materials, Engineering (LEACIM), Universite de La Rochelle, Avenue Michel Crepeau, 17042 La Rochelle Cedex 01, France |
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| Abstract: | In this work, electrohydrodynamic atomization deposition, combined with mechanical polishing, was used for the fabrication of dense and even PZT thick films. The PZT slurry was ball-milled and the effect of milling time on the characteristics of the deposited films was examined. A time of 50 h was found to be the optimum milling time to produce dense films. It was found that the PZT thick films presented rough surface after deposition. In order to overcome this drawback the mechanical polishing process was employed on the deposited films. After the mechanical polishing the roughness (Ra) and peak-to-peak height (Rz) of the film surface were decreased from 422 nm to 23 nm and from 5 µm to 150 nm, respectively. Subsequently, an increase of ~10 pC N?1 on piezoelectric constant (d33, f) was obtained. In addition, it was observed that the d33 was increased from 57 pC N?1 to 89 pC N?1 when the thickness was increased from 10 µm to 80 µm. |
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| Keywords: | Electrohydrodynamic atomization deposition PZT thick film Mechanical polishing |
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