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Effect of the Y2O3 additive concentration on the properties of a silicon nitride ceramic substrate
Affiliation:1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;2. Federal Institute for Materials Research and Testing, Unter den Eichen 44-46, 12203 Berlin, Germany;3. Institute of Nonmetallic Materials, Clausthal University of Technology, Zehntnerstr. 2a, Clausthal-Zellerfeld 38678, Germany;1. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;2. School of Chemical Engineering and Light Industry, Guangdong University of Technology, Guangzhou 510006, China;1. Yokohama Oils & Fats Industry Co., Ltd., 1-1 Minamisengencho, Nishi-ku, Yokohama 220-0074, Japan;2. Materials Processing Unit, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan;3. Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 2266-98 Anagahora, Shimo-Shidami, Moriyama-ku, Nagoya 463-8560, Japan;4. Department of Materials and Life Sciences, Sophia University, Chiyoda Ku, Tokyo 1028554, Japan;1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141 Republic of Korea;2. Advanced Materials R&D Department, KCC Corporation, 19 Wanjusandan 4-ro, Wanju-gun, Jeonbuk-do, 55321 Republic of Korea
Abstract:Silicon nitride (Si3N4) ceramics offer excellent thermal, mechanical and dielectric properties, which make Si3N4 a good candidate material for an application as electronic packaging material. For an application as a heat dissipation substrate, most studies focused on achieving a high thermal conductivity through long-time heat preservation and different kinds of heat treatments. Very few studies also considered the mechanical and dielectric properties. In addition, there have not been systematic researches about influence of additives concentration and type on the combination properties of Si3N4. Therefore, in this study, Si3N4 ceramic samples were prepared via hot pressing at 1800 °C with a relatively short heat preservation step (2 h), with different amounts of Y2O3 added as sintering additive. The effect of the initial concentration of the rare earth oxide on the chemical composition, microstructure, thermal conductivity, as well as the mechanical and dielectric properties of the Si3N4 ceramic samples was systematically studied.
Keywords:Microstructure  Thermal conductivity  Mechanical properties
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