ZnMgBeO/Ag/ZnMgBeO transparent multilayer films with UV energy bandgap and very low resistance |
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| Affiliation: | 1. Science Branch, Department of Fisheries and Oceans Canada, Northwest Atlantic Fisheries Centre, P.O. Box 5667, St. John’s, Newfoundland and Labrador A1C 5X1, Canada;2. Centre for Fisheries Ecosystems Research, Fisheries and Marine Institute of Memorial University of Newfoundland, P.O. Box 4920, St. John’s, Newfoundland and Labrador A1C 5R3, Canada;1. Kyung Hee University, Yongin-si 446-701, Gyeonggi-do, South Korea;2. National Fusion Research Institute, Daejeon-si 305-333, South Korea |
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| Abstract: | The ZnMgBeO/Ag/ZnMgBeO multilayer structures were sputter grown and their electrical and optical properties have been investigated in detail. Results indicated that the ZnMgBeO(30 nm)/Ag(10 nm)/ZnMgBeO(30 nm) optimum structure shows energy bandgap of ~4.5 eV, electrical resistivity of ~6.5×10?5 Ωcm, and optical transmittance of 78–90% over the visible wavelength range and 74–90% over 300–400 nm range, representing a significant improvement over the previously reported transparent conducting films. High resistivity (~0.12 MΩcm) of the ZnMgBeO layer did not critically affect the conductivity of the multilayer, because the Ag films act as the conducting path. It was also observed that the properties were substantially deteriorated at the Ag thickness of 5 nm, as the Ag film is only partly continuous, resulting in very rough interfaces and surfaces. |
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| Keywords: | Transparent conductive electrode Multilayer structure ZnMgBeO Ultraviolet |
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