气相色谱／质谱法测定三氟化氮中痕量一氧化二氮

建立了测定高纯三氟化氮（NB）气体中痕量一氧化二氮（N2O）的选择离子监测（SIM）方式的气相色谱／质谱法。采用Porapak Q PLOT毛细管色谱柱（30m×0．32mm×5μm），以m／z=44作为定量选择离子。同时考察了NF3工艺气物流对所选离子的测定干扰情况。方法在浓度为（5～100）×10^-6（摩尔分数）范围内与峰面积呈线性关系，线性相关系数r=0．999，最低检测限为1×10^-6（摩尔分数）。平均加标回收率为90．20％～97．05％，测定相对标准偏差（RSD）〈5．33％。

Determines Trace Nitrogen Monoxide in Nitrogen Trifluoride by Gas Chromatography-Mass Spectrometry

A new method for the determination of the trace nitrogen monoxide in high purity nitrogen trifluoride gas by gas chromatography-mass spectrometry selected ion monitoring（SIM） mode was established. The analysis was carried out on a Porapak Q PLOT capillary column （ 30 m × 0.32 mm × 5 μm ）. The quantitative selected ion is 44. The interference to the determination of selected ion was studied. The linear range was for 5.0 × 10^-6 to 100 × 10^-6 with relative coefficient of 0. 999. The mininum detection limit was 1 × 10^-6. The average recovery was 90. 2% -97.05%. The relative standard deviations （RSD） of nitrogen monoxide was less than 5. 33% .