全自动双轴精密划片机的研制

为提高划片机的划片质量和划片效率，研制全自动双轴精密划片机。整机采用了龙门式结构，工具轴Y1与Y2采用并列平行的结构设计，使用全闭环控制；旋转工作台采用DD马达直接驱动；上下料系统可实现多盘的全自动上下料。检测结果表明:Y1/Y2轴的全程定位精度达到 1.5 μm，Z1/Z2轴的重复定位精度达到 1.0 μm，工作台平面度达到 4.3 μm。划切试验结果表明:划切沟槽的实际深度与设计深度的最大误差为5.2 μm，划切痕迹的实际位置与设计位置的最大误差为4.8 μm，划切表面平整光滑，崩边小，无毛刺。与国内传统的单轴划片机相比，所研制的双轴划片机划片效率提高了80%，划片质量得到了明显提高。 

Development of automatic double-spindle precise dicing saw

In order to improve dicing quality and efficiency, a double-spindle precision dicing saw is developed. It adopts a gantry structure with parallel axes Y1 & Y2 and closed-loop control. The rotary table is driven directly by DD motor. Loading and unloading system of the saw can realize multi-plate automatic feeding. Test results show that the positioning accuracy of axes Y1 & Y2 is up to 1.5 μm, that the repeatability accuracy of axes Z1 & Z2 is up to 1.0 μm, and that the table flatness is up to 4.3 μm. After dicing test, it is found that the maximum error between actual depth and designed depth of groove is 5.2 μm, and that the maximum error between actual position and designed position of dicing trace is 4.8 μm, the trace surface of which is smooth with small chipping but no burrs. Compared with traditional single-spindle dicing saw in China, the developed one has 80% higher dicing efficiency obviously improved dicing quality.