光学玻璃的高效精密划切工艺研究

利用自主研发的FAD1210高精高效划片机，通过单因素试验法研究了装夹紧固方式、划片刀种类、切割水流量对K9光学玻璃划切性能的影响，且检测其崩边宽度及表面粗糙度来评价划切效果。结果表明:玻璃基板的紧固方式效果较好，UV膜次之，高温硅胶带较差；树脂结合剂划片刀划切玻璃的效果较理想，其崩边宽度较小、表面粗糙度较好，金属刀次之，电镀刀效果较差；切割水流量增大，玻璃崩边宽度和表面粗糙度逐渐减小，当切割水流量大于4.5 L/min时，划切效果趋于稳定。在玻璃基板紧固方式、树脂划片刀和切割水流量4.5 L/min的优化参数下划切K9光学玻璃，划切效果最佳，崩边宽度为5.8 μm，表面粗糙度R_a为10.5 nm。 

Research on process of high-efficiency precise dicing optical glass

Single factor tests are implemented on self-developed FAD 1210 high-precision and high-efficiency slicing machine. The influences of clamping method, dicing blade type and water flow rate on the sliced K9 optical glass are studied and evaluated by measuring the chipping size and the surface roughness of the glass. The results show that the fastening mode of glass substrate has the best effect on the cutting of K9 optical glass, followed by UV film and high temperature silicone tape. The effect of resin bond dicing blade is ideal when dicing glass, with smaller chipping size and better surface roughness. The metal dicing blade ranks next and the effect of electroplating dicing blade is worst. With the increase of dicing water flow rate, the chipping size and surface roughness decrease gradually. When the dicing water flow rate is more than 4.5 L/min, the dicing effect tends to be stable. When chipping K9 optical glass under the optimum parameters of glass substrate fastening mode, resin dicing blade and dicing water flow rate of 4.5 L/min, the dicing effect is the best with chipping size of 5.8 μm and surface roughness R_a of 10.5 nm.