| 高衍射效率凸面闪耀光栅的研制 |
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| 引用本文： | 刘全,吴建宏,郭培亮,陈新华.高衍射效率凸面闪耀光栅的研制[J].中国激光,2019(3):304-308. |
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| 作者姓名： | 刘全 吴建宏 郭培亮 陈新华 |
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| 作者单位： | 苏州大学光电科学与工程学院苏州纳米科技协同创新中心;苏州大学江苏省先进光学制造技术重点实验室;苏州大学教育部现代光学技术重点实验室 |
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| 基金项目： | 高分辨率对地观测系统重大专项(GFZX04061502);国家重点研发计划(2016YFB0500501);国家自然科学基金(60907017);上海市全固态激光器与应用技术重点实验室开放课题基金(2014ADL02);江苏高校优势学科建设工程(YX40000212) |
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| 摘 要： | 基于严格耦合波分析,研究凸面闪耀光栅的衍射特性;采用全息光刻-离子束刻蚀法制作中心周期为2.45μm、曲率半径为51.64 mm、口径为17 mm的凸面闪耀光栅,闪耀角为6.4°,顶角为141°。结果表明,在整个可见-近红外波段,所制作光栅的1级衍射效率大于40%,在闪耀波长处1级衍射效率大于75%。
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| 关 键 词： | 光栅 凸面闪耀光栅 全息光刻 离子束刻蚀 衍射效率 |
Fabrication of Convex Blazed Grating with High Diffraction Efficiency |
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| Liu Quan,Wu Jianhong,Guo Peiliang,Chen Xinhua.Fabrication of Convex Blazed Grating with High Diffraction Efficiency[J].Chinese Journal of Lasers,2019(3):304-308. |
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| Authors: | Liu Quan Wu Jianhong Guo Peiliang Chen Xinhua |
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| Affiliation: | (School of Optoelectronic Science and Engineering,Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou,Jiangsu 215006,China) |
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| Abstract: | Liu Quan;Wu Jianhong;Guo Peiliang;Chen Xinhua(School of Optoelectronic Science and Engineering,Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou,Jiangsu 215006,China) |
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| Keywords: | gratings convex blazed grating holographic lithography ion beam etching diffraction efficiency |
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