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Surface structure of plasma-etched (211)B HgCdTe
Authors:J. D. Benson  A. J. Stoltz  J. B. Varesi  L. A. Almeida  E. P. G. Smith  S. M. Johnson  M. Martinka  A. W. Kaleczyc  J. K. Markunas  P. R. Boyd  J. H. Dinan
Affiliation:(1) U.S. Army RDECOM, CERDEC Night Vision and Electronic Sensors Directorate, 22060 Ft. Belvoir, VA;(2) Raytheon Vision Systems, 93117 Goleta, CA;(3) U.S. Army Research Laboratory, 20783 Adelphia, MD
Abstract:The surface of (211)B HgCdTe has been studied by reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). RHEED analysis of the as-grown Hg-rich molecular beam epitaxy (MBE) (211)B HgCdTe suggests the surface reconstructs by additional Hg incorporation. The plasma-etched (211)B HgCdTe surface is crystalline but stepped and facetted. RHEED analysis indicates asymmetric pyramids (base dimensions ≈0.5×1.1 nm) are formed to minimize surface Hg concentration. The AFM examination of plasma-etched (211)B HgCdTe reveals oriented mesoscopic features.
Keywords:HgCdTe  reflection high-energy electron diffraction (RHEED)  plasma etched
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