外差式激光干涉仪应用于正弦直线和旋转振动测量技术的研究

介绍外差式激光干涉仪和应用于旋转振动测量的衍射光栅技术理论和工作原理。针对马赫-泽德外差式激光干涉仪在绝对法振动校准技术中的应用，简要介绍了测量系统另外两个重要组成部分（频移变换和数字信号处理）的原理、算法和技术实现。这种振动测量系统与正弦直线和旋转激振系统相配合，采用同一种正弦逼近的信号处理方法，可实现直线振动量（位移、速度、加速度）和旋转振动量（角位移、角速度、角加速度）两大类型、各种振动传感器幅相特性绝对法的精确校准。

Investigation of Translational and Rotational Vibration Measurement Using a Heterodyne Interferometer

The theoretical background and details of heterodyne interferemetry and diffraction grating interferemetry are described. In addition to the application of a Mach-Zehnder interferemeter to the primary vibration calibration method, the calibration system developed also includes frequency shift part and signal processing part, whose principles and algorithms are fully described. By applying sine-approximation method to the phase sequence, the heteredyne interferemeter technology in combination with high-speed A/D conversion and numerical demodulation method can carry out amplitude and phase measurements of three translational and three rotational motion quantifies accurately if different exciters are available.