Single high-order transverse mode surface-emitting laser with controlled far-field pattern

Single transverse mode vertical-cavity surface-emitting lasers (VCSELs) with high output power are important for high-speed data links, optical recording, laser processing, and so on. We demonstrate a single high-order transverse mode VCSEL with narrow trenches formed on its top surface by using a focused ion beam. The formation of four straight cross trenches resulted in the selection of a stable LP/sub 41/ mode oscillation. A large far-field angle of the LP/sub 41/ mode, which causes a low coupling efficiency even with a multimode fiber, was drastically reduced by loading a phase shift layer. A single-lobe far-field pattern with low scattering loss was realized by loading a spatial phase shift of SiO/sub 2/. We evaluated a coupling efficiency with a single-mode fiber including its alignment tolerance. The controlled far-field pattern enables lens-free direct coupling with a single-mode fiber even for large active-area VCSELs.