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(Ba,Sr)TiO3薄膜制备技术新进展
引用本文:单志强,丁淑芳.(Ba,Sr)TiO3薄膜制备技术新进展[J].金属功能材料,2009,16(4):53-56.
作者姓名:单志强  丁淑芳
作者单位:黑龙江科技学院资源与环境学院,黑龙江,哈尔滨,150027
摘    要:(Ba,Sr)TiO3(简称BST)铁电薄膜材料是目前国际上新型功能材料研究的热点之一,本文综述了钛酸锶钡(BST)铁电薄膜目前最常用的4种制备工艺,并简要介绍了BST目前的研究进展、微观结构、性能及应用,深入分析了BST铁电薄膜主要制备技术的优缺点,指出了目前铁电薄膜及其制备技术研究中应注意的问题。

关 键 词:(Ba  Sr)TiO  铁电薄膜  制备方法

Synthesis and New Development of (Ba,Sr) TiO3 Ferro-electric Thin Films
SHAN Zhi-qiang,DING Shu-Fang.Synthesis and New Development of (Ba,Sr) TiO3 Ferro-electric Thin Films[J].Metallic Functional Materials,2009,16(4):53-56.
Authors:SHAN Zhi-qiang  DING Shu-Fang
Affiliation:(Dept. of Resources and Environment, Heilongjiang Institute of Science & Technology, Harbin 150027, Heilongjiang, China)
Abstract:BST ferroelectric thin film is one of the new functional materials with attractive application prospects. The preparation of the ferroeleetric thin film was described. The microstrueture, characteristic and application of ferroe-lectric thin films were studied. The advantages and disadvantages of different preparation methods are discussed. Some research problems of this material which need to be paid more attention to are put forward.
Keywords:(Ba  Sr)TiO  (Ba  Sr) Ti3 ferroelectric thin film  preparation
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