| 静电刚度式谐振微加速度传感器的结构稳定性 |
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| 引用本文： | 张凤田,施志贵,何晓平,刘恒.静电刚度式谐振微加速度传感器的结构稳定性[J].微纳电子技术,2010,47(12). |
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| 作者姓名： | 张凤田 施志贵 何晓平 刘恒 |
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| 作者单位： | 中国工程物理研究院电子工程研究所; |
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| 基金项目： | 中国工程物理研究院科学技术发展基金 |
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| 摘 要： | 为了研究静电刚度式谐振微加速度传感器结构稳定的判据和影响其稳定性的因素,根据静电刚度式谐振微加速度传感器的结构原理,分析了传感器中质量块与音叉梁的运动和受力特点,建立了传感器中质量块与音叉梁在加速度作用前后的力平衡方程。采用数值方法求解力平衡方程,得到了传感器结构的一个稳定平衡点和一个非稳定平衡点,以及两个平衡点重合时对应的结构稳定临界检测电压,分析了加速度作用前后不同质量块支撑梁弹性系数和平行板检测电容间隙对临界检测电压的影响。结果显示,临界检测电压随质量快支撑梁弹性系数和平行板检测电容间隙的增大而增加。当有加速度作用时,临界检测电压将发生变化,但对量程为-1~1g的超低量程加速度传感器,加速度作用前后临界检测电压变化很小,不会引起传感器结构稳定性太大的变化。
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| 关 键 词： | 微电子机械系统(MEMS) 静电刚度 谐振 加速度传感器 稳定性 |
Structure Stability of Micro Silicon Resonant Acceleration Sensors Based on Electrostatic Rigidity |
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| Zhang Fengtian,Shi Zhigui,He Xiaoping,Liu Heng.Structure Stability of Micro Silicon Resonant Acceleration Sensors Based on Electrostatic Rigidity[J].Micronanoelectronic Technology,2010,47(12). |
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| Authors: | Zhang Fengtian Shi Zhigui He Xiaoping Liu Heng |
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| Affiliation: | Zhang Fengtian,Shi Zhigui,He Xiaoping,Liu Heng(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China) |
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| Abstract: | To study the criteria for the structure stability of the micro silicon resonant acceleration sensor based on the electrostatic rigidity and the influence factors on the structure stability,the movement and forces characteristics of the proof mass and double ended tunning fork(DETF)were analysed according to the structure principle of the micro acceleration sensor,and the force equilibrium equations of the proof mass and DETF were built before and after an acceleration actting on.The equations were solved wi... |
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| Keywords: | micro-electromechanical system(MEMS) electrostatic rigidity resonant acceleration sensor stability |
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