| Preparation of CeO2 abrasives by reducing atmosphere-assisted molten salt method for enhancing their chemical mechanical polishing performance on SiO2 substrates |
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| 作者姓名： | Ning Xu Jiahui Ma Qi Liu Yuxin Luo Yongping Pu |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (51905324)；;the Scientific Research Program Funded by Shaanxi Provincial Education Department (20JK0545)；;the Doctoral Scientific Research Startup Foundation of Shaanxi University of Science and Technology (2018BJ-14)； |
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| 摘 要： | Ce3+as the active site on the CeO2 abrasive surface is the key to enhancing the material removal rate(MRR).The CeO2 abrasives with high chemical activity were prepared by the molten salt method under a reducing atmosphere.The crystal structure and morphology of CeO2 abrasive s were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),transmission electron microscopy(TEM),Fourier transform infrared spectroscopy(FT-IR),ultraviolet—vi...
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