Calibrating a scanning electron microscope by means of a linear measure having one certified dimension

A method is proposed for calibrating a scanning electron microscope that enables one to use a linear measure with a single certified dimension to determine all the basic parameters needed for making linear measurements: image magnification, electron-probe diameter, and correction parameter for deriving the true dimensions of relief elements from the distance between video-signal maxima.Translated from Izmeritel'naya Tekhnika, No. 7, pp. 68–70, July, 1994.