Entwicklung eines Ionisationsmanometers mit Feldemitterkathode

Development of an ion gauge with field emissionin cryogenic vacuum environments cathode for pressure measurements The measurement of UHV or even XHV pressures in low‐temperature vacuum systems has always been considered as a metrological problem. In principle, conventional hot‐cathode ion gauges can be used for pressure measurement in cryogenic vacuum environments. However, as a consequence of their high heat generation several disadvantages must be taken into account. With the development of an ion gauge of extractor‐type whose heat‐generating thermionic cathode is replaced by a non‐thermal field emission cathode, a promising approach to realize a reliable pressure gauge for cryogenic vacuum applications can be presented in this paper. The gauge equipped with a CNT cathode was investigated both experimentally and by numerical simulations in terms of their operating characteristics. It has been successfully demonstrated that the modified extractor gauge works reliably under low temperature conditions and provides meaningful pressure readings.