Flash Lamp Annealing of ITO thin films on ultra‐thin glass |
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| Authors: | Stephanie Weller Manuela Junghähnel |
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| Affiliation: | Fraunhofer Institut für Organische Elektronik, Elektronenstrahl‐ und Plasmatechnik FEP, Winterbergstra?e 28, 01277 Dresden |
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| Abstract: | Ultra‐fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium‐tin‐oxide films on rigid and ultra‐thin flexible glass and improves their conductivity and transmittance. |
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