Adhesion aspects of poly(p-xylylene) to SiO2 surfaces using γ-methacryloxypropyltrimethoxysilane as an adhesion promoter

The use of organo-silanes as coupling agents offers the potential to create novel structures using materials that would otherwise suffer from poor adhesion. γ-methacryloxypropyltrimethoxysilane (γ-MAPTS) layers were deposited on hydroxylated SiO₂ surfaces using both vapor and solution deposition techniques. The films were characterized using variable angle spectroscopic ellipsometry, infrared spectroscopy, contact-angle measurements and X-ray photoelectron spectroscopy. Film thickness was relatively constant at ～6 Å for solution deposition times from 2 min to 2 h at 60° C. Water contact angle increased from 0° to 45° after silane deposition from solution. Room temperature vapor-deposited γ-MAPTS films showed similar thicknesses to those of solution deposited films but a markedly lower contact angle of 10°. Parylene N was chemical vapor deposited on the γ-MAPTS films and its adhesion was tested using the Scotch^® Tape test. The γ-MAPTS improved adhesion of parylene N to the hydroxylated surface, with the adhesion for the vapor deposited silane films exhibiting a temperature and time dependence.