A Theoretical Study of Thin Film Delamination Using Clamped Punch-Loaded Blister Test: Energy Release Rate and Closed-Form Solution

Using an exact analytical solution of axisymmetric deformation of a circular membrane centrally connected to a rigid plate under the action of concentrated load at its center, we present an exact formula for the energy release rate applicable to ultrathin film–substrate systems without residual stresses or with small residual stresses. Also, a closed-form solution of axisymmetric deformation of circular membrane under the action of concentrated load at its center is presented.