| 粉末溅射ZnO薄膜酒敏元件 |
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| 引用本文： | 周磊,邢建平,周晨,洪德斌,裘南畹.粉末溅射ZnO薄膜酒敏元件[J].山东大学学报(工学版),2007,37(1):111-114. |
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| 作者姓名： | 周磊 邢建平 周晨 洪德斌 裘南畹 |
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| 作者单位： | 1. 山东大学,信息科学与工程学院,山东,济南,250100
2. 山东大学,物理与微电子学院,山东,济南,250100 |
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| 基金项目： | 国家自然科学基金;山东火炬计划项目 |
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| 摘 要： | 针对金属氧化物薄膜气敏元件传统制造工艺中存在的掺杂不稳问题，开发了一种实用化的ZnO薄膜气敏基材料.采用粉末溅射法研制ZnO:1%CeO2薄膜，利用衬底Al2O3与ZnO晶体均为六方结构的特点，选择适当溅射参数研制出薄膜气敏元件，同时通过悬挂芯片双点焊工艺，使元件更加小型化.长期检测结果表明，此类元件气敏特性和稳定性良好，适合进一步推广应用.
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| 关 键 词： | 粉末溅射 薄膜 双点焊 |
| 文章编号： | 1672-3961(2007)01-0111-04 |
| 收稿时间： | 2006-03-08 |
| 修稿时间： | 2006年3月8日 |
Powder sputtered ZnO thin-film alcohol sensor |
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| ZHOU Lei,XING Jian-ping,ZHOU Chen,HONG De-bin,QIU Nan-yuan.Powder sputtered ZnO thin-film alcohol sensor[J].Journal of Shandong University of Technology,2007,37(1):111-114. |
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| Authors: | ZHOU Lei XING Jian-ping ZHOU Chen HONG De-bin QIU Nan-yuan |
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| Affiliation: | 1. School of Information Science and Engineering, Shandong University, Jinan 250100, China；2. School of Physics and Microelectronics, Shandong University, Jinan 250100, China |
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| Abstract: | For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thin film gas sensing basic material was developed. The ZnO/1%CeO2 thin film was prepared by adopting the powder sputtering method. Based on the characteristic of the hexahedron crystal of substrate Al2O3 and ZnO, a thin film gas sensor was developed by selecting proper sputtered parameters. A micro miniature pensile gas sensor was acquired by double point welding of the chip and wiring pole techniques. Long term experiment results show that the favorable gas sensing character and stability of the element is suitable for further application. |
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| Keywords: | powder sputter thin-film double point weld |
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