| Abstract: | Use of material structure sizes as measuring‐normal Lengths measurement is a comparison/evaluating of received measuring signals with a standard/calibration yardstick. The nano‐technology requires measuring accuracies from the submeter to the nanometer range, i.e. a range over 9 orders of magnitude. Strobes and possible measuringnormal are classified according to their requirements and analyzed on requirements, accuracy, stability, data sets and feasibility. For nano‐position‐ and nano‐measuring‐maschine are summarized suggestions for a feasibility. |
