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AlGaN/GaN HEMT 小信号模型提取方法的改进
引用本文:蒲颜,庞磊,王亮,陈晓娟,李诚瞻,刘新宇. AlGaN/GaN HEMT 小信号模型提取方法的改进[J]. 半导体学报, 2009, 30(12): 124003-5
作者姓名:蒲颜  庞磊  王亮  陈晓娟  李诚瞻  刘新宇
作者单位:Institute;Microelectronics;Chinese;Academy;Sciences;
基金项目:国家重点基础研究发展计划
摘    要:The accurate extraction of AlGaN/GaN HEMT small-signal models, which is an important step in largesignal modeling, can exactly reflect the microwave performance of the physical structure of the device. A new method of extracting the parasitic elements is presented, and an open dummy structure is introduced to obtain the parasitic capacitances. With a Schottky resistor in the gate, a new method is developed to extract Rg. In order to characterize the changes of the depletion region under various drain voltages, the drain delay factor is involved in the output conductance of the device. Compared to the traditional method, the fitting of S 11 and S 22 is improved, and fT and fmax can be better predicted. The validity of the proposed method is verified with excellent correlation between the measured and simulated S-parameters in the range of 0.1 to 26.1 GHz.

关 键 词:HEMT器件  AlGaN  小信号模型  电阻提取  有效性验证  微波性能  物理结构  寄生参数
收稿时间:2009-06-14
修稿时间:2009-07-15

Improvements to the extraction of an AlGaN/GaN HEMT small-signal model
Pu Yan,Pang Lei,Wang Liang,Chen Xiaojuan,Li Chengzhan and Liu Xinyu. Improvements to the extraction of an AlGaN/GaN HEMT small-signal model[J]. Chinese Journal of Semiconductors, 2009, 30(12): 124003-5
Authors:Pu Yan  Pang Lei  Wang Liang  Chen Xiaojuan  Li Chengzhan  Liu Xinyu
Affiliation:Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Abstract:The accurate extraction of AlGaN/GaN HEMT small-signal models, which is an important step in large-signal modeling, can exactly reflect the microwave performance of the physical structure of the device. A new method of extracting the parasitic elements is presented, and an open dummy structure is introduced to obtain the parasitic capacitances. With a Schottky resistor in the gate, a new method is developed to extract Rg. In order to characterize the changes of the depletion region under various drain voltages, the drain delay factor is involved in the output conductance of the device. Compared to the traditional method, the fitting of S 11 and S 22 is improved, and fT and fmax can be better predicted. The validity of the proposed method is verified with excellent correlation between the measured and simulated S -parameters in the range of 0.1 to 26.1 GHz.
Keywords:AlGaN/GaN HEMT   small-signal model   Schottky resistor   drain delay
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