| 超低温薄膜压力传感器的研究 |
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| 引用本文： | 李小换,邹其利,张世名.超低温薄膜压力传感器的研究[J].仪表技术与传感器,2009(Z1). |
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| 作者姓名： | 李小换 邹其利 张世名 |
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| 作者单位： | 航天长征火箭技术有限公司,北京,100076 |
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| 摘 要： | 超低温薄膜压力传感器可用于液氢、液氮、液氧等低温环境的压力测量,目前国内外超低温压力传感器产品的工作温度最低为-200 ℃.文中主要介绍了对超低温薄膜压力传感器的研究,通过薄膜压力传感器设计和工艺技术研究,成功研制出超低温薄膜压力传感器,并在-253(液氢)～+60 ℃温度环境下进行压力传感器静态性能测试,结果表明传感器性能指标优异,实现了超低温薄膜压力传感器技术突破.
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| 关 键 词： | 薄膜压力传感器薄膜沉积 灵敏度温度自补偿 薄膜激光修调 液氢 |
Research of Ultra Low Temperature Thin Film Pressure Sensor |
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| LI Xiao-huan,ZOU Qi-li,ZHANG Shi-ming.Research of Ultra Low Temperature Thin Film Pressure Sensor[J].Instrument Technique and Sensor,2009(Z1). |
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| Authors: | LI Xiao-huan ZOU Qi-li ZHANG Shi-ming |
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| Abstract: | Ultra low temperature thin film pressure sensor can be used on low temperature environment pressure measure of liquid hydrogen,liquid nitrogen,liquid oxygen and so on.The product's lowest working temperature is -200 ℃ until now.This article mainly introduce research of ultra low temperature thin film pressure sensor.Through research of thin film pressure sensor designs and techniques research,ultra low temperature thin film pressure sensor was prepared successfully,and the sensor's static performance was tested in -253～+60 ℃ environment.The result indicated that the index of the sensor was well,the techniques of ultra low temperature thin film pressure sensor was archived. |
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| Keywords: | thin film deposition thin film pressure sensor thin films laser repaired liquid hydrogen |
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