| 一种微分散射自控测量系统 |
| |
| 引用本文： | 王敏,高爱华,杨捷.一种微分散射自控测量系统[J].光学仪器,2013,35(6):53-57. |
| |
| 作者姓名： | 王敏 高爱华 杨捷 |
| |
| 作者单位： | 西安工业大学 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032;西安工业大学 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032;西安工业大学 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032 |
| |
| 基金项目： | 国防基础研究资助项目（A0920110019）；总装先进制造资助项目（51318020303） |
| |
| 摘 要： | 基于微分散射测量原理,设计了一种计算机自动控制微分测量系统,利用该系统最终能够得到散射样品表面的空间分布情况。该方法不仅能了解样片表面微观特征,而且采用了自控测量系统。微分散射自控测量系统能够减少操控繁琐的步骤并且重复性较好,经验证测量系统的最小可探测光功率可达1.628×10-6 mW,测量的最大误差在±1%范围内。
|
| 关 键 词： | 散射 光电探测器 激光器 调制 |
| 收稿时间： | 2013/8/22 0:00:00 |
Automatic measurement system for differential scattering |
| |
| WANG Min,GAO Aihua and YANG Jie.Automatic measurement system for differential scattering[J].Optical Instruments,2013,35(6):53-57. |
| |
| Authors: | WANG Min GAO Aihua and YANG Jie |
| |
| Affiliation: | Shaanxi Province Key Laboratory for Thin Film Techniques and Optical Test, Xi'an Technological University, Xi'an 710032, China;Shaanxi Province Key Laboratory for Thin Film Techniques and Optical Test, Xi'an Technological University, Xi'an 710032, China;Shaanxi Province Key Laboratory for Thin Film Techniques and Optical Test, Xi'an Technological University, Xi'an 710032, China |
| |
| Abstract: | Based on the differential scattering measurement principle, a computer automatic control differential measurement system is designed, which could be used to get the scattering on the surface of the sample space distribution. The method, which uses the automatic measuring system, is able for us to understand the plate surface micro characteristics. Differential scattering control measurement system can reduce the manipulation of the cumbersome steps and it shows good repeatability. It is verified that the minimum detectable light power of the measurement system can reach 1.628×10-6 mW, and the biggest error within ±1%. |
| |
| Keywords: | scattering photoelectric detector laser modulation |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《光学仪器》浏览原始摘要信息 |
|
点击此处可从《光学仪器》下载全文 |
|
