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| 基于Labview技术的光度式椭偏测厚仪的研究与设计 | |
| 引用本文： | 张牧, 张诚, 陈才和, 王金海, 张波, 岳泉,.基于Labview技术的光度式椭偏测厚仪的研究与设计[J].电子器件,2007,30(1):170-173. |
| 作者姓名： | 张牧 张诚 陈才和 王金海 张波 岳泉 |
| 作者单位： | 1. 天津工业大学,天津,300160 2. 天津大学精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津,300072 3. 天津工业大学,天津,300160;天津大学精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津,300072 |
| 摘 要： | 本文介绍了一种基于Labview的光度式椭偏仪光学测量系统,用于进行透明薄膜厚度的精确测量.研究并推导出该系统的数学模型及椭偏参数的计算公式.基于C9051F020单片机设计出椭偏仪的控制器并使用Labview编写了测量软件.在测量软件中嵌入Matlab Script节点,完成复杂运算.通过对SiO2薄膜的测试,验证了仪器具有良好的可靠性和重复性,薄膜厚度误差小于100 A,折射率误差小于0.01. |
| 关 键 词： | 椭偏仪 光度法 虚拟仪器 Labview C8051F020 |
| 文章编号： | 1005-9490（2007）01-0170-04 |
| 修稿时间： | 2006-02-24 |
Research and Design of Photoelectric Analysis Type Ellipsometer Based on Labview Technology |
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| ZHANG Mu,ZHANG Cheng,CHEN Cai-he,WANG Jin-hai,ZHANG Bo,YUE Quan.Research and Design of Photoelectric Analysis Type Ellipsometer Based on Labview Technology[J].Journal of Electron Devices,2007,30(1):170-173. | |
| Authors: | ZHANG Mu~ ZHANG Cheng~ CHEN Cai-he~ WANG Jin-hai~ ZHANG Bo~ YUE Quan~ |
| Affiliation: | 1. Tianjin Polytechnic University, Tianjin 300160, China;2. College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Key Laboratory of Optoelectronics Information Technical Science of EMC , Tianj in 300072, China |
| Abstract: | The paper introduces a photoelectric analysis type ellipsometer optical system based on Labview, which can realize accurate measurement of film thickness. The mathematical model of the system and the formula of elliptical parameter are researched and deduceck The ellipsometer controller using C8051F020 is designed and the Labview testing soft is developed. Through the testing of SiOz film, it has been proved that the reliability and repetition of the instrument are favorable. The measurement error of the film thickness is less than 100 A and the measurement error of the refractivity rate is less than 0. 01. |
| Keywords: | ellipsometer photoelectric analysis virtual instrumentation labview C8051F020 |
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