PSD幅值定位法多光束同步检测技术研究

在光电精密位置检测系统中,采用尽可能少的光电探测器从多路光束中获取足够信息实现检测,有利于提高系统的可靠性并降低成本.从信号同步检测的思想出发,对位置敏感探测器(Position-Sensitive Detector,简称PSD)幅值定位法多光束同步检测技术的理论和实验系统进行了深入研究,设计了分离不同频率信号的信号处理电路,分别使用单片一维PSD和二维PSD对两路光束进行同步检测与信号分离实验,证明可以完成多光束的同步检测,并估算出了所设计的实验系统能够同步检测的最大光路数.研究工作为多光束信号同步检测提供了一种新方法.

Study on Detecting Multiple Light Beams Synchronously Based on the Method of PSD Amplitude Measure

In opto-electronic precision position measuring systems, getting enough information from multiple light beams with less opto-electronic detectors can improve the reliability of the systems and reduce the cost of the systems. According to the idea of detecting signal synchronously, the theory and experiment system of detecting multiple light beams synchronously are studied based on the method of PSD amplitude measure. The different frequency signal separating circuit is designed. Through the experiments of detecting two light beams synchronously with one 1D-PSD and 2D-PSD respectively, the result proves the realization of simultaneous detection in this way. The maximum of light beams which can be detected synchronously by one PSD in this experiment system is estimated. This research work offers a new way for multiple light beams simultaneous detection.