微系统用超声微电机的研究现状和发展趋势

 微电机是微机电系统(MEMS)的核心，超声微电机是一个新的发展方向．这几年发展十分迅速． 首先对比分析超声微电机与电磁型微电机和静电微电机的区别，对国内外现有的几种超声微电机及其发展趋势进行了介绍和分析，指出目前超声微电机发展存在研究定位不明和关键技术尚未完全解决两大问题。并提出了今后超声微电机发展的研究定位和必须解决的一些关键技术，其应用重点是军民两用，特别是军工． 最后，指出市场牵引和工程实现是超声微电机取得突破的关键因素的同时，政府、产业和研究单位各方面的重视和形成合力则是推进我国超声微电机研究和产业化的关键．

Research situation and development of ultrasonic micro-motor in MEMS

Micro-motor is the core of MEMS and so ultrasonic micro-motor becomes a new research center and relevant research develops quickly in recent years. Firstly, the paper analysizes the differences among ultrasonic motor, electromagnetic motor and static motor; introduces the development on ultrasonic micro-motors at home and abroad; points out two problems in the development-the vague research orientation and inadequently-solved key technique, the research orientation in further study, some key problems that must be solved and the application potential in civil and martial occasions, especially in martial occasion; subsequently, points out market orientation and engineering application are crucial factors for the breakthrough of ultrasonic micro-motor and at the same time, sufficient attention and corporation among government, industry and researching unit are also very important for the research and industrialization of ultrasonic micro-motor in China.