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新型溶胶-凝胶法制备纳米MgO薄膜的研究
引用本文:符晓荣,宋志棠,多新中,林成鲁,武光明. 新型溶胶-凝胶法制备纳米MgO薄膜的研究[J]. 无机材料学报, 1999, 14(5): 828-832
作者姓名:符晓荣  宋志棠  多新中  林成鲁  武光明
作者单位:1. 中国科学院上海冶金所, 信息功能材料国家重点实验室 上海 200050; 2. 北京石油化工学院基础部 北京 102600
摘    要:以硝酸镁为起始原料,胶棉液为添加剂,在Si(100)衬底上成功地制备MgO薄膜,结果表明,胶棉液是形成MgO溶胶的关键组份;薄膜的晶体结构与胶棉液的含量及退火温度有关.同时,用X射线衍射(XRD)、原子力显微镜(AFM)和透射电镜(TEM)对薄膜的微观结构进行了分析.

关 键 词:薄膜  溶胶-凝胶法  
收稿时间:1998-11-05
修稿时间:1998-12-31

A New Sol-Gel Approach to Prepare MgO Thin Films
FU Xiao-Rong,WU Guang-Ming,SONG Zhi-Tang,DUO Xin-Zhong,LIN Cheng-Lu. A New Sol-Gel Approach to Prepare MgO Thin Films[J]. Journal of Inorganic Materials, 1999, 14(5): 828-832
Authors:FU Xiao-Rong  WU Guang-Ming  SONG Zhi-Tang  DUO Xin-Zhong  LIN Cheng-Lu
Affiliation:1.National Key Laboratory of Functional Material for Informatics; Shanghai Institute of MetallurgyChinese Academy of Sciencs Shanghai 200050 China; 2. Beijing Institute of Petrochemical Technology Beijing 102600 China
Abstract:MgO thin films were successfully prepared on Si substrate by a novel and simple Sol-Gelmethod. The results indicated that collodion is a key element to form stable MgO sols. Thestructures of MgO films are closely related to the amount of collodion and the annealing temperature. In addition, the microstructures of the MgO thin films were examined with X-ray distraction(XRD), Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM).
Keywords:MgO  thin films  Sol-Gel method
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