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Influence of the distance between target and substrate on the properties of transparent conducting AI-Zr co-doped zinc oxide thin films |
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| Authors: | Zhang Huafu Liu Hanfa Zhou Aiping and Yuan Changkun |
| Affiliation: | School of Science, Shandong University of Technology, Zibo 255049, China |
| Abstract: | Al-Zr co-doped zinc oxide films transparent conducting films magnetron sputtering distance between target and substrate |
| Keywords: | Al-Zr co-doped zinc oxide films transparent conducting films magnetron sputtering distance between target and substrate |
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