| 工艺参数对纳米颗粒Cu/SiO_2复合薄膜结构和光谱特性的影响 |
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| 引用本文： | 李强勇,黄良甫,罗崇泰,刘定权,李守中. 工艺参数对纳米颗粒Cu/SiO_2复合薄膜结构和光谱特性的影响[J]. 真空科学与技术学报, 1996, 0(4) |
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| 作者姓名： | 李强勇 黄良甫 罗崇泰 刘定权 李守中 |
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| 作者单位： | 兰州物理研究所!兰州730000 |
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| 摘 要： | 用离子束溅射法制备了具有反常光吸收特性的纳米颗粒CU／SiO2复合薄膜。获得了在离子来参数一定时，基片温度、膜料的沉积时间和镀膜后的保温时间等工艺参数对这种薄膜结构和光学特性的影响规律，并对纳米颗粒Cu／SiO2复合薄膜的反常光吸收特性作了计算和解释。
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| 关 键 词： | 纳米颗粒 薄膜 光学特性 |
INFLUENCE OF THE TECHNOLOGICAL PARAMETERS ON THE STRUCTURE AND PROPERTIES OF NANOMETER PARTICLE Cu/SiO_2 THIN FILM |
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| Li Qiangyong, Huang Liangfu, Luo Chongtai, Liu Dingquan, Li Shouzhong. INFLUENCE OF THE TECHNOLOGICAL PARAMETERS ON THE STRUCTURE AND PROPERTIES OF NANOMETER PARTICLE Cu/SiO_2 THIN FILM[J]. JOurnal of Vacuum Science and Technology, 1996, 0(4) |
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| Authors: | Li Qiangyong Huang Liangfu Luo Chongtai Liu Dingquan Li Shouzhong |
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| Abstract: | Nanometer particle Cu/SiO2 thin solid films were prepared by ion beam deposition which possess anomalous optical absorptlon properity. The regularity of the influence of parameters such as the temperature of substrate,the deposition time and the annealing time after deposition on the structure and optical property when the parameters of ion beam are unchangable has been obtained. The anomalous absorption phenomenon of nanometer particle Cu/SO2 film has been explained and calculated. |
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| Keywords: | Nanometer particle Thin film Optic property |
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