| 渗氮—气相沉积硬质膜复合处理技术及其发展 |
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| 引用本文： | 谢飞. 渗氮—气相沉积硬质膜复合处理技术及其发展[J]. 江苏石油化工学院学报, 2001, 13(4): 38-41 |
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| 作者姓名： | 谢飞 |
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| 作者单位： | 江苏石油化工学院机械工程系 江苏常州213016 |
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| 基金项目： | 国家自然科学基金资助项目 (19392 30 0 - 5 ) |
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| 摘 要： | 阐述了渗氮－气相沉积硬质膜复合处理的设计思想。从渗氮－气相沉积硬质膜复合处理工艺方法的选择、复合处理层组织结构、性能研究等方面介绍了渗氮－气相沉积硬质膜复合处理技术的发展。
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| 关 键 词： | 渗氮 气相沉积 复合处理 硬质膜 表面处理 |
Technique and Development of Duplex Treatment of Nitriding and Vapor Deposition of Hard Films |
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| XIE Fei. Technique and Development of Duplex Treatment of Nitriding and Vapor Deposition of Hard Films[J]. Journal of Jiangsu Institute of Petrochemical Technology, 2001, 13(4): 38-41 |
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| Authors: | XIE Fei |
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| Abstract: | The principle is presented for designing duplex treatment of nitriding and vapor deposition of hard films. The development of the duplex treatment of nitriding and vapor deposition of hard films is introduced from the points of selecting duplex treatment processes, improving the microstructure and properties of the duplex-treated layer. |
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| Keywords: | nitriding vapor deposition duplex treatment hard film |
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