| 氧等离子体辅助脉冲激光沉积法制备PMN-PT薄膜的微观结构和电学性能 |
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| 引用本文： | 何邕,李效民,高相东,冷雪,王炜.氧等离子体辅助脉冲激光沉积法制备PMN-PT薄膜的微观结构和电学性能[J].无机材料学报,2011,26(11):1227-1232. |
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| 作者姓名： | 何邕 李效民 高相东 冷雪 王炜 |
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| 作者单位： | (1. 中国科学院 上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海200050; 2. 中国科学院 研究生院, 北京100049) |
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| 基金项目： | National Basic Research Program of China(973 Program)(2009CB623304); National Natural Science Foundation of China(11090332) |
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| 摘 要： | 采用氧等离子体辅助脉冲激光沉积方法(PLD)在硅衬底上, 制备出高度(001)取向的钙钛矿相结构钛铌镁酸铅(PMN-PT)薄膜. 研究了氧等离子体辅助对PMN-PT薄膜相结构、微观形貌和电学性能的影响. 结果表明, 通过在薄膜沉积过程中引入高活性的氧等离子, 可以有效地提高PMN-PT薄膜的结晶质量和微观结构. 未采用氧等离子体辅助PLD方法制备PMN-PT薄膜的介电常数(10 kHz)和剩余极化(2Pr)分别为1484和18 μC/cm2, 通过采用氧等离子体辅助, 其介电常数和剩余极化分别提高至3012和38 μC/cm2.
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| 关 键 词： | 脉冲激光沉积法 PMN-PT薄膜 微观结构 电学性能 |
| 收稿时间： | 2011-05-17 |
| 修稿时间： | 2011-06-13 |
Microstructure and Electrical Properties of PMN-PT Thin Films Prepared by Oxygen Plasma Assisted Pulsed Laser Deposition |
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| HE Yong,LI Xiao-Min,GAO Xiang-Dong,LENG Xue,WANG Wei.Microstructure and Electrical Properties of PMN-PT Thin Films Prepared by Oxygen Plasma Assisted Pulsed Laser Deposition[J].Journal of Inorganic Materials,2011,26(11):1227-1232. |
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| Authors: | HE Yong LI Xiao-Min GAO Xiang-Dong LENG Xue WANG Wei |
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| Affiliation: | (1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China) |
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| Abstract: | Lead magnesium niobate-lead titanate(PMN-PT) ferroelectric thin films with composition near the morphotropic phase boundary(MPB) were deposited on Si substrate by oxygen plasma assisted pulsed laser deposition (PLD).Highly(001)-oriented PMN-PT thin films with lower oxygen defect and higher crystalline property were obtained.The results show that the microstructure and electrical properties of PMN-PT thin films strongly depend on the partial pressure and the activity of oxygen in the deposition process.With ... |
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| Keywords: | pulse laser deposition PMN-PT thin films microstructure electrical properties |
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