Synthesis of aligned carbon nanotubes by thermal chemical vapor deposition |
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Authors: | Gang Li Ming Zhou Weiwei Ma Lan Cai |
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Affiliation: | (1) Jiangsu Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Jiangsu, Zhenjiang, 212013, China;(2) School of Automobile and Traffic Engineering, Jiangsu University, Jiangsu, Zhenjiang, 212013, China |
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Abstract: | Single crystal silicon was found to be very beneficial to the growth of aligned carbon nanotubes by chemical vapor deposition
with C2H2 as carbon source. A thin film of Ni served as catalyst was deposited on the Si substrate by the K575X Peltier Cooled High
Resolution Sputter Coater before growth. The growth properties of carbon nanotubes were studied as a function of the Ni catalyst
layer thickness. The diameter, growth rate and areal density of the carbon nanotubes were controlled by the initial thickness
of the catalyst layer. Steric hindrance between nanotubes forces them to grow in well-aligned manner at an initial stage of
growth. Transmission electron microscope analysis revealed that nanotubes grew by a tip growth mechanism.
Funded by the National Natural Science Foundation of China (No. 50435030) |
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Keywords: | carbon nanotubes magnetron sputtering chemical vapor deposition tip-growth |
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